Gigaphoton Inc., a manufacturer of light sources for semiconductor lithography, has developed an on-site neon gas recycling system for ArF excimer lasers, achieving a neon gas recycling rate of up to 50%.
The company announced the development of hTGM for ArF, which collects and recycles used gas within semiconductor fabs. A single unit can reduce gas consumption by up to 470 kiloliters per year and connect to up to five ArF lasers, facilitating efficient production ramp.
President Tatsuo Enami said the new system aims to mitigate risks associated with rare gas procurement, support stable operations for customers, and enhance supply chain resilience in the semiconductor industry. Gigaphoton will continue to contribute through advanced laser technologies and environmentally conscious solutions.
Established in 2000, Gigaphoton is a leading provider of KrF and ArF excimer laser light sources for semiconductor lithography, expanding its capabilities into new fields such as EUV lightsources and advanced packaging.
